Axcelis Technologies,Inc. (NASDAQ:ACLS) Files An 8-K Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

Item 5.02 Departure of Directors or Certain Officers; Election of
Directors; Appointment of Certain Officers; Compensatory
Arrangements of Certain Officers.

(e)Amendment of 2012 Equity Incentive Plan

At the 2017 annual meeting of the stockholders of Axcelis
Technologies,Inc. (the Company) held on May16, 2017 (the Annual
Meeting), the Companys stockholders approved an amendment to the
Companys 2012 Equity Incentive Plan (the Amended Equity Plan) to
increase the number of shares of common stock reserved under the
plan for future issuance by 1,000,000 shares. The Companys Board
of Directors and the Compensation Committee of the Board of
Directors previously approved the Amended Equity Plan, subject to
such stockholder approval. The Companys executive officers are
eligible to participate in the Amended Equity Plan. A summary of
the material terms of the Amended Equity Plan is set forth in the
Companys definitive proxy statement for the Annual Meeting filed
with the Securities and Exchange Commission on March29, 2017 (the
Proxy Statement). A copy of the Amended Equity Plan is filed with
the Proxy Statement.

Item 5.07. Submission of Matters to a Vote of Security
Holders.

The Annual Meeting was held at the offices of Locke Lord LLP at
111 Huntington Avenue, Boston, Massachusetts on May16, 2017. Out
of 29,932,286 shares of Common Stock (as of the record date of
March22, 2017) entitled to vote at the meeting, 26,792,525
shares, or 89.51%, were present in person or by proxy.

1. At the Annual Meeting, each of the eight nominees for election
as directors received the number of votes set opposite the
nominees name, constituting a plurality of the votes cast, and
therefore such nominee has been duly elected as a director of the
Company:

2. The following sets forth the tally of the votes cast on the
proposal to ratify the appointment by the Board of Directors of
Ernst Young LLP as independent auditors of the Companys financial
statements for the year ending December31, 2017. A majority of
the votes cast were voted in favor of the proposal, and therefore
the appointment of auditors has been ratified by the
stockholders.

About Axcelis Technologies, Inc. (NASDAQ:ACLS)

Axcelis Technologies, Inc. designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The Company also provides aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. The Company offers a complete line of high energy, high current and medium current implanters for all application requirements. The Company’s Purion XE high energy system combines its radio frequency (RF) Linac high energy, spot beam technology with the Purion platform. The Company also offers the Purion M medium current system. The Company’s Purion M systems also offer differentiation for specialty applications, such as hot silicon carbide. The Company’s Purion H high current system is extendable into ultra-low energy applications to satisfy future process requirements, including leakage current performance.

Axcelis Technologies, Inc. (NASDAQ:ACLS) Recent Trading Information

Axcelis Technologies, Inc. (NASDAQ:ACLS) closed its last trading session down -1.00 at 20.75 with 488,958 shares trading hands.